Active Isolation Systems AIS
Active vibration isolation system providing control by means of electro-pneumatic in either 3 or 6 Degrees Of Freedom.
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Range of Application
Optimal active vibration isolation performance for machines with high dynamic forces that are performing sensitive measurements and inspections, lithography equipment, laser machines, high resolution electron microscopes, interferometer,& machinery for the semiconductor industry
The Active vibration isolation system AIS™ is utilized when the efficiency of isolation and the settling time of conventional air spring with electro-pneumatic leveling systems is insufficient.
Active Vibration Isolation System AIS™ has two primary functions :
One function is to protect the precision machine from floor vibration. The other primary function is to improve the performance of the machine by minimizing structure borne vibration created by the high dynamic forces produced during an acceleration or deceleration of a moving mass within the machine. In addition, settling time is reduced which minimizes the delay time before the machine can start performing its sensitive operation. ,